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Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations /unibl/sci/idNaucniRad:3726 https://dx.doi.org/10.1117/12.341214 Conference Paper text 1999-03 Ž. Mrčarica, V. Risojević, M. Lenczner, M. Jakovljević, V. Litovski, Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations, Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306, pp. 306 - 315, Mar, 1999 http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=984703 306 315 Design, Test, and Microfabrication of MEMS/MOEMS Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306 /unibl/author/Željko Mrčarica https://www.unibl.org/sr-lat/fis/zaposlen/1128-vladimir-risojevic /unibl/author/Michel Lenczner /unibl/author/Mirko Jakovljević /unibl/author/Vančo Litovski https://etf.unibl.org Design, Test, and Microfabrication of MEMS/MOEMS Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306 315 306 /unibl/author/Željko Mrčarica https://www.unibl.org/sr-lat/fis/zaposlen/1128-vladimir-risojevic /unibl/author/Michel Lenczner /unibl/author/Mirko Jakovljević /unibl/author/Vančo Litovski https://www.pub.unibl.org/s/cir/item/36094