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oai:pub.unibl.org:36094 2024-06-12T16:16:40Z

Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations /unibl/author/Željko Mrčarica https://www.unibl.org/sr-lat/fis/zaposlen/1128-vladimir-risojevic /unibl/author/Michel Lenczner /unibl/author/Mirko Jakovljević /unibl/author/Vančo Litovski 1999-03 Conference Paper text 315 306 /unibl/sci/idNaucniRad:3726 https://dx.doi.org/10.1117/12.341214 https://etf.unibl.org Design, Test, and Microfabrication of MEMS/MOEMS Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306 Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306 http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=984703 Ž. Mrčarica, V. Risojević, M. Lenczner, M. Jakovljević, V. Litovski, Integrated simulator for MEMS using FEM implementation in AHDL and frontal solver for large sparse systems of equations, Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, 306, pp. 306 - 315, Mar, 1999 https://www.pub.unibl.org/s/cir/item/36094